Speaker:
William A. J. NEIJSSEN, BSc. Product Marketing
Manager Quanta Series for NanoResearch, FEI Company, the
Theme:
Nano prototyping
using FIB
Abstract:
“The potential of focused ion beam
equipment for prototyping of micromechanical structures has been recognized. Until recently, this potential has mostly been
exploited using case-specific deposition and milling geometries and
design/fabrication strategies that were tailored to individual designs. This way of working limits the design complexity because
of the limited amount of milling/deposition operations that can be done in a
practical and timely fashion. This lecture will focus on (new) techniques which
can be used to quickly realize complex designs using a Dual Beam system”.